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Physics of Plasmas / Volume 12 / Issue 5 / REVIEW PAPERS

Phys. Plasmas 12, 055501 (2005); http://dx.doi.org/10.1063/1.1887171 (11 pages)

Hot plasma effects in gas discharge plasma a

a Paper MR1 2, Bull. Am. Phys. Soc. 49, 246 (2004).
Valery Godyak

Osram Sylvania, Inc., 71 Cherry Hill Drive, Beverly, Massachusetts 01915

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(Received 19 November 2004; accepted 3 February 2005; published online 9 May 2005)

The subject of this paper is an abbreviated review of a recent study of rf discharges operating at low pressures where hot electron and nonlinear effects are essential. In this operational regime anomalous skin effect and collisionless electron heating may occur. From the direct measurement of electromagnetic fields and rf current density it was possible to infer the rf power absorption and to distinguish collisional and stochastic regimes of electromagnetic field interaction with bounded plasma. Some new features found in experiments with rf plasmas, associated with electron thermal motion and nonlinear effects induced by the rf Lorentz force, are discussed, together with corresponding theoretical results.

© 2005 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. PLASMA PARAMETERS IN rf DISCHARGES
  3. NONLOCAL ELECTRON KINETICS
  4. NONLOCAL ELECTRON ELECTRODYNAMICS
    1. Electric field and current density distribution
    2. Collisionless power absorption
    3. Negative power absorption
    4. Nonlocality parameter
  5. NONLINEAR EFFECTS
    1. Nonlinear rf potential
    2. Second harmonic current
    3. Ponderomotive effect
    4. Ponderomotive force in hot plasma
  6. CONCLUSIONS

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KEYWORDS and PACS

Keywords

high-frequency discharges, reviews, plasma nonlinear processes, plasma heating, current density, stochastic processes, plasma boundary layers, plasma transport processes

PACS

  • 52.80.Pi

    High-frequency and RF discharges

  • 52.40.Hf

    Plasma-material interactions; boundary layer effects

  • 52.50.Gj

    Plasma heating by particle beams

  • 52.35.Mw

    Nonlinear phenomena: waves, wave propagation, and other interactions (including parametric effects, mode coupling, ponderomotive effects, etc.)

  • 52.25.Fi

    Transport properties

  • 01.30.Rr

    Surveys and tutorial papers; resource letters

  • 05.40.-a

    Fluctuation phenomena, random processes, noise, and Brownian motion

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1887171

PUBLICATION DATA

ISSN

1070-664X (print)  
1089-7674 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    M.A. Lieberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).

    V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, J. Appl. Phys. 85, 703 (1999)JAPIAU000085000002000703000001.

    R. B. Piejak, V. A. Godyak, and B. M. Alexandrovich, J. Appl. Phys. 81, 3416 (1997)JAPIAU000081000008003416000001.

    R. B. Piejak, V. A. Godyak, and B. M. Alexandrovich, Rev. Sci. Instrum. 72, 4002 (2001)RSINAK000072000010004002000001.

    E. S. Weibel, Phys. Fluids 10, 741 (1967)PFLDAS000010000004000741000001.

    V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Phys. Rev. Lett. 80, 3264 (1998).

    V. A. Godyak and V. I. Kolobov, Phys. Rev. Lett. 79, 4589 (1997).

    G. Gunge, B. Crowley, D. Vender, and M. Turner, J. Appl. Phys. 89, 3580 (2001)JAPIAU000089000007003580000001.

    H. A. Blevin, J. A. Reynolds, and P. C. Thonemann, Phys. Fluids 16, 82 (1973)PFLDAS000016000001000082000001.

    V. Vahedi, M. A. Lieberman, G. DiPeso, T. D. Rognlien, and D. Hewett, J. Appl. Phys. 78, 1446 (1995)JAPIAU000078000003001446000001.

    G. G. Lister, Y-M. Li, and V. A. Godyak, J. Appl. Phys. 79, 8993 (1996)JAPIAU000079000012008993000001.

    A. I. Smolyakov, V. A. Godyak, and A. Duffy, Phys. Plasmas 7, 4755 (2000)PHPAEN000007000011004755000001.

    A. I. Smolyakov, V. A. Godyak, and Yu. O. Tishetskiy, Phys. Plasmas 10, 2108 (2003)PHPAEN000010000005002108000001.

    V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Phys. Rev. Lett. 83, 1610 (1999).

    R. H. Cohen and T. D. Rognlien, Phys. Plasmas 3, 1839 (1996)PHPAEN000003000005001839000001.

    F. F. Chen, Phys. Plasmas 8, 3008 (2001)PHPAEN000008000006003008000001.

    A. I. Smolyakov, V. A. Godyak, and Yu. O. Tishetskiy, Phys. Plasmas 8, 3857 (2001)PHPAEN000008000009003857000001.

    V. A. Godyak, B. M. Alexandrovich, and V. I. Kolobov, Phys. Rev. E 64, 026406 (2001).

    A. V. Vasenkov and M. J. Kushner, Phys. Rev. E 66, 066411 (2002).


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